Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403507 | Transfer apparatus, cleaning module, and substrate processing apparatus | Akihiro Yazawa, Manato Furusawa, Hideharu Aoyama, Ayumu Saito, Yusuke Sasaya +4 more | 2025-09-02 |
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Fong-Jie Du +5 more | 2025-02-25 |
| 11911868 | Substrate processing apparatus, substrate processing method, and storage medium that stores program to cause computer in substrate processing apparatus to execute substrate processing method | Takashi Mitsuya, Ayumu Saito | 2024-02-27 |
| 11890716 | Polishing unit, substrate processing apparatus, and polishing method | Akihiro Yazawa, Kenichi Kobayashi | 2024-02-06 |
| 11638980 | Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus | Kenichi Kobayashi, Makoto Kashiwagi, Manao Hoshina | 2023-05-02 |
| 11400561 | Top ring for holding a substrate and substrate processing apparatus | Kenichi Kobayashi, Makoto Kashiwagi, Manao Hoshina | 2022-08-02 |
| 11305399 | Jig for a polishing apparatus | Kenichi Kobayashi, Makoto Kashiwagi, Manao Hoshina | 2022-04-19 |
| D890825 | Substrate holding parts | Kenichi Kobayashi, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |
| D890823 | Substrate holding parts | Kenichi Kobayashi, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |
| D890822 | Substrate holding parts | Kenichi Kobayashi, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |
| D890824 | Substrate holding parts | Kenichi Kobayashi, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |