Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403507 | Transfer apparatus, cleaning module, and substrate processing apparatus | Asagi Matsugu, Akihiro Yazawa, Manato Furusawa, Ayumu Saito, Yusuke Sasaya +4 more | 2025-09-02 |
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Fong-Jie Du +5 more | 2025-02-25 |
| 11773504 | Plating support system, plating support device, and recording medium | Mitsuhiro Shamoto, Masashi Shimoyama, Tsutomu Nakada, Masayuki Fujiki | 2023-10-03 |
| 10577714 | Plating apparatus and plating method | Yoshitaka Mukaiyama, Jumpei Fujikata | 2020-03-03 |
| 10446422 | Method of controlling display of operation of semiconductor manufacturing apparatus and non-transitory computer readable storage medium therefor, and system for performing display concerning operation of semiconductor manufacturing apparatus | Masayuki Fujiki, Ryuya Koizumi | 2019-10-15 |