Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315699 | Substrate treating apparatus and substrate treating method | Yoon Jong Ju, Seong Gil LEE, Jae Hwan Kim, Wan Jae Park, Hye Joon KHEEL +1 more | 2025-05-27 |
| 12308219 | Substrate treating method and substrate treating apparatus | Seong Gil LEE, Myoung Sub NOH, Dong-Hun Kim, Dong Sub Oh, Jun Taek KOO +1 more | 2025-05-20 |
| 12237151 | Apparatus and method for processing substrate using plasma | Seong Gil LEE, Myoung Sub NOH, Dong Sub Oh, Min Sung Han, Dong-Hun Kim +1 more | 2025-02-25 |
| 12146710 | Substrate treating apparatus and substrate treating system comprising the same | Joun Taek Koo, Wan Jae Park, Dong-Hun Kim, Seong Gil LEE, Ji Hwan Lee +3 more | 2024-11-19 |
| 11495467 | Method and apparatus for etching thin layer | Jung Suk GOH, Jae Seong LEE, Do Youn LIM, Kuk Saeng KIM, Young Dae CHUNG +12 more | 2022-11-08 |