Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341030 | Support unit and substrate treating apparatus | Kyung-Man Kim, Jeong Woo HAN, Ji Hwan Lee, Wan Jae Park, Seong Hak BAE | 2025-06-24 |
| 12315699 | Substrate treating apparatus and substrate treating method | Seong Gil LEE, Jae Hwan Kim, Wan Jae Park, Hye Joon KHEEL, Ji Hoon Park +1 more | 2025-05-27 |
| 12176185 | Apparatus and method for processing substrate using plasma | Min Sung Han, Jae Hoo Lee, Wan Jae Park | 2024-12-24 |
| 11978654 | Substrate processing apparatus | Min Sung Han, Wan Jae Park, Jaehoo Lee | 2024-05-07 |
| 11167326 | Substrate processing apparatus and nozzle unit | Min Sung Han, Doyeon KIM, Jinkyu Kim | 2021-11-09 |
| 10964557 | Substrate processing apparatus and substrate processing method | Do Yeon Kim, Jin Kyu Kim, Min Sung Han, Joon Ho WON, Yong Tak Hyun | 2021-03-30 |
| 10471457 | Inspection unit, inspection method, and substrate treating apparatus including the same | Keunhwa Yang, Kihoon Choi, Kwangsup Kim | 2019-11-12 |
| 10357806 | Substrate treating apparatus and method | Jong Han Kim, Yu Hwan Kim, Edwin Lee, Seong-soo Lee | 2019-07-23 |
| 10211074 | Substrate treating apparatus and treatment liquid nozzle | Kihoon Choi, Hyeon Jun Lee | 2019-02-19 |
| 10186419 | Method for treating a substrate with a shock wave | Kihoon Choi, In-Il JUNG, Seong-Soo Kim | 2019-01-22 |