Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340983 | Apparatus for treating substrate and method for treating substrate | Dong-Hun Kim, Ji Hoon Park, Du Ri Kim | 2025-06-24 |
| 12341030 | Support unit and substrate treating apparatus | Kyung-Man Kim, Jeong Woo HAN, Ji Hwan Lee, Yoon Jong Ju, Seong Hak BAE | 2025-06-24 |
| 12327735 | Apparatus and method for processing substrate | Seong Gil LEE, Sehoon Oh, Dong Sub Oh, Ji Hwan Lee, Dong-Hun Kim | 2025-06-10 |
| 12315699 | Substrate treating apparatus and substrate treating method | Yoon Jong Ju, Seong Gil LEE, Jae Hwan Kim, Hye Joon KHEEL, Ji Hoon Park +1 more | 2025-05-27 |
| 12308219 | Substrate treating method and substrate treating apparatus | Seong Gil LEE, Myoung Sub NOH, Dong-Hun Kim, Young Je UM, Dong Sub Oh +1 more | 2025-05-20 |
| 12237151 | Apparatus and method for processing substrate using plasma | Seong Gil LEE, Young Je UM, Myoung Sub NOH, Dong Sub Oh, Min Sung Han +1 more | 2025-02-25 |
| 12176185 | Apparatus and method for processing substrate using plasma | Min Sung Han, Jae Hoo Lee, Yoon Jong Ju | 2024-12-24 |
| 12146710 | Substrate treating apparatus and substrate treating system comprising the same | Young Je UM, Joun Taek Koo, Dong-Hun Kim, Seong Gil LEE, Ji Hwan Lee +3 more | 2024-11-19 |
| 12142492 | Method for treating substrate and apparatus for treating substrate | Ji Hwan Lee, Seong Gil LEE, Dong Sub Oh, MYOUNGSUB NOH, Dong-Hun Kim | 2024-11-12 |
| 11978654 | Substrate processing apparatus | Min Sung Han, Yoon Jong Ju, Jaehoo Lee | 2024-05-07 |
| 11372332 | Plasma treatment method to improve photo resist roughness and remove photo resist scum | Akiteru Ko | 2022-06-28 |
| 10770294 | Selective atomic layer deposition (ALD) of protective caps to enhance extreme ultra-violet (EUV) etch resistance | David L. O'Meara, Lior Huli, Soo Doo Chae | 2020-09-08 |
| 9978567 | Apparatus and method of treating a substrate | Yong-Hyun Ham, Hyung Je Woo, Hyun-Joong Kim, Kyu Young Han | 2018-05-22 |
| 8058176 | Methods of patterning insulating layers using etching techniques that compensate for etch rate variations | Kaushik A. Kumar, Joseph Edward Linville, Anthony D. Lisi, Ravi Prakash Srivastava, Hermann Wendt | 2011-11-15 |
| 7560332 | Integrated circuit capacitor structure | Kyoung-Woo Lee, Jeong Hoon Ahn, Kyung-Tae Lee, Mu-kyeng Jung, Yong Jun Lee +2 more | 2009-07-14 |
| 7553758 | Method of fabricating interconnections of microelectronic device using dual damascene process | Hyung-yoon Choi, Yi-Hsiung Lin, Tong Qing Chen | 2009-06-30 |
| 7541290 | Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing | Chong-Kwang Chang, Len Yuan Tsou, Haoren Zhuang, Matthias Lipinsky, Shailendra Mishra | 2009-06-02 |
| 7488687 | Methods of forming electrical interconnect structures using polymer residues to increase etching selectivity through dielectric layers | Jae Hak Kim, Tong Qing Chen, Yi-Hsiung Lin | 2009-02-10 |
| 7435673 | Methods of forming integrated circuit devices having metal interconnect structures therein | Kyoung-Woo Lee, Ja-Hum Ku, Duk-Ho Hong | 2008-10-14 |
| 7229875 | Integrated circuit capacitor structure | Kyoung-Woo Lee, Jeong Hoon Ahn, Kyung-Tae Lee, Mu-kyeng Jung, Yong Jun Lee +2 more | 2007-06-12 |
| 7183195 | Method of fabricating dual damascene interconnections of microelectronic device using hybrid low k-dielectric and carbon-free inorganic filler | Kyoung-Woo Lee, Soo-geun Lee, Jae Hak Kim, Hong-Jae Shin | 2007-02-27 |
| 7145140 | Method of determining whether a conductive layer of a semiconductor device is exposed through a contact hold | Ji Soo Kim, Kyoung-Sub Shin | 2006-12-05 |
| 7033944 | Dual damascene process | Il-Goo Kim, Sang-rok Hah, Kyoung-Woo Lee | 2006-04-25 |
| 6855629 | Method for forming a dual damascene wiring pattern in a semiconductor device | Jae Hak Kim, Soo-geun Lee, Kyoung-Woo Lee | 2005-02-15 |
| 6849536 | Inter-metal dielectric patterns and method of forming the same | Soo-geun Lee, Ju-Hyuk Chung, Il-Goo Kim, Kyoung-Woo Lee, Jae Hak Kim | 2005-02-01 |