Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327735 | Apparatus and method for processing substrate | Seong Gil LEE, Dong Sub Oh, Ji Hwan Lee, Dong-Hun Kim, Wan Jae Park | 2025-06-10 |
| 11835929 | Control device for plant and controlling method of the same | Hanul Jung | 2023-12-05 |
| 10533904 | Elastically actuating device | Chan Woo Lee | 2020-01-14 |
| 10005092 | Nozzle and substrate treating apparatus including the same | Kihoon Choi, Jinkyu Kim | 2018-06-26 |
| 8382554 | Substrate polishing apparatus and method of polishing substrate using the same | Seong-Soo Kim | 2013-02-26 |