Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7541290 | Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing | Chong-Kwang Chang, Wan Jae Park, Len Yuan Tsou, Haoren Zhuang, Shailendra Mishra | 2009-06-02 |