Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899257 | Etch stop liner for contact punch through mitigation in SOI substrate | Jin Z. Wallner | 2018-02-20 |
| 9887135 | Methods for providing variable feature widths in a self-aligned spacer-mask patterning process | Jin Z. Wallner | 2018-02-06 |
| 9070759 | Semiconductor device and method of making same | Jin-Ping Han, Jiang Yan, Jingyu Lian, Manfred Eller | 2015-06-30 |
| 8697339 | Semiconductor device manufacturing methods | Chong-Kwang Chang, Alois Gutmann, Jingyu Lian, Matthias Lipinski, Len Yuan Tsou +1 more | 2014-04-15 |
| 8394574 | Metrology systems and methods for lithography processes | Chandrasekhar Sarma, Jingyu Lian, Matthias Lipinski | 2013-03-12 |
| 8349528 | Semiconductor devices and methods of manufacturing thereof | Matthias Lipinski, Alois Gutmann, Jingyu Lian, Chandrasekhar Sarma | 2013-01-08 |
| 8219938 | Semiconductor inter-field dose correction | Hyung-Rae Lee, Dong-Hee Yu, Len Yuan Tsou | 2012-07-10 |
| 8071261 | Lithography masks and methods of manufacture thereof | Alois Gutmann, Sajan Marokkey, Henning Haffner, Chandrasekhar Sarma, Matthias Lipinski | 2011-12-06 |
| 8067135 | Metrology systems and methods for lithography processes | Chandrasekhar Sarma, Jingyu Lian, Matthias Lipinski | 2011-11-29 |
| 8063406 | Semiconductor device having a polysilicon layer with a non-constant doping profile | Matthias Lipinski, Jingyu Lian, Chandrasekhar Sarma | 2011-11-22 |
| 8039203 | Integrated circuits and methods of design and manufacture thereof | Helen Wang, Scott D. Halle, Henning Haffner, Klaus Herold, Matthew E. Colburn +4 more | 2011-10-18 |
| 8007985 | Semiconductor devices and methods of manufacturing thereof | Matthias Lipinski, Alois Gutmann, Jingyu Lian, Chandrasekhar Sarma | 2011-08-30 |
| 7842579 | Method for manufacturing a semiconductor device having doped and undoped polysilicon layers | Matthias Lipinski, Jingyu Lian, Chandrasekhar Sarma | 2010-11-30 |
| 7794903 | Metrology systems and methods for lithography processes | Chandrasekhar Sarma, Jingyu Lian, Matthias Lipinski | 2010-09-14 |
| 7759235 | Semiconductor device manufacturing methods | Helen Wang, Len Yuan Tsou, Scott D. Halle | 2010-07-20 |
| 7674350 | Feature dimension control in a manufacturing process | Alois Gutmann, Matthias Lipinski, Chandrasekhar Sarma, Jingyu Lian | 2010-03-09 |
| 7645663 | Method of producing non volatile memory device | Danny Pak-Chum Shum, John Power | 2010-01-12 |
| 7598174 | Feature patterning methods | — | 2009-10-06 |
| 7541290 | Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing | Chong-Kwang Chang, Wan Jae Park, Len Yuan Tsou, Matthias Lipinsky, Shailendra Mishra | 2009-06-02 |
| 7541234 | Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas | Chong-Kwang Chang, Matthias Lipinski, Shailendra Mishra, O Sung Kwon, Tjin Tjin Tjoa +1 more | 2009-06-02 |
| 7316980 | Method for forming ferrocapacitors and FeRAM devices | Ulrich Egger, Rainer Bruchhaus, Karl Hornik, Jenny Lian, Stefan Gernhardt | 2008-01-08 |
| 7115522 | Method for manufacturing semiconductor device | Kazuhiro Tomioka | 2006-10-03 |
| 7098142 | Method of etching ferroelectric devices | Ulrich Egger, Rainer Bruchhaus | 2006-08-29 |
| 7071506 | Device for inhibiting hydrogen damage in ferroelectric capacitor devices | Bum Ki Moon, Karl Hornik, Ulrich Egger, Jenny Lian, Andreas Hilliger | 2006-07-04 |
| 7045837 | Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing | Ulrich Egger, Yoshinoru Kumura, Kazuhiro Tomioka, Hiroyuki Kanaya | 2006-05-16 |