Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7045837 | Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing | Ulrich Egger, Haoren Zhuang, Kazuhiro Tomioka, Hiroyuki Kanaya | 2006-05-16 |