| 7504680 |
Semiconductor device and mask pattern |
Osamu Arisumi, Yoshinori Kumura, Kazuhiro Tomioka, Haoran Zhuang, Bum Ki Moon |
2009-03-17 |
| 7316980 |
Method for forming ferrocapacitors and FeRAM devices |
Haoren Zhuang, Rainer Bruchhaus, Karl Hornik, Jenny Lian, Stefan Gernhardt |
2008-01-08 |
| 7098142 |
Method of etching ferroelectric devices |
Haoren Zhuang, Rainer Bruchhaus |
2006-08-29 |
| 7071506 |
Device for inhibiting hydrogen damage in ferroelectric capacitor devices |
Bum Ki Moon, Karl Hornik, Haoren Zhuang, Jenny Lian, Andreas Hilliger |
2006-07-04 |
| 7045837 |
Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing |
Haoren Zhuang, Yoshinoru Kumura, Kazuhiro Tomioka, Hiroyuki Kanaya |
2006-05-16 |
| 7042705 |
Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing |
Haoren Zhuang, Kazuhiro Tomioka, Jingyu Lian, Nicolas Nagel, Andreas Hilliger +1 more |
2006-05-09 |
| 7015049 |
Fence-free etching of iridium barrier having a steep taper angle |
Haoren Zhuang, George Stojakovic, Kazuhiro Tomioka |
2006-03-21 |
| 7001781 |
Method for producing a ferroelectric capacitor that includes etching with hardmasks |
Jenny Lian, Haoren Zhuang |
2006-02-21 |
| 7001780 |
Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method |
Haoren Zhuang, Jingyu Lian, Stefan Gernhardt, Hiroyuki Kanaya |
2006-02-21 |
| 6924156 |
Method for forming a ferroelectric capacitor device |
Haoren Zhuang |
2005-08-02 |
| 6897501 |
Avoiding shorting in capacitors |
Haoren Zhuang, Jingyu Lian, Gerhard Beitel, Karl Hornik |
2005-05-24 |
| 6867053 |
Fabrication of a FeRAM capacitor using a noble metal hardmask |
Haoren Zhuang, Rainer Bruchhaus |
2005-03-15 |
| 6785119 |
Ferroelectric capacitor and process for its manufacture |
Haoren Zhuang, Karl Hornik |
2004-08-31 |
| 6762064 |
Process for fabrication of a ferrocapacitor |
Haoren Zhuang, Kazuhiro Tomioka |
2004-07-13 |
| 6746877 |
Encapsulation of ferroelectric capacitors |
Karl Hornik, Rainer Bruchhaus |
2004-06-08 |
| 6734057 |
Method of patterning capacitors and capacitors made thereby |
Jenny Lian, Haoren Zhuang, Karl Hornik |
2004-05-11 |
