Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8828748 | Test structures and methods | — | 2014-09-09 |
| 8715909 | Lithography systems and methods of manufacturing using thereof | Alois Gutmann, Henning Haffner, Chandrasekhar Sarma, Roderick Koehle | 2014-05-06 |
| 8518820 | Methods for forming contacts in semiconductor devices | Roberto Schiwon, Klaus Herold, Jenny Lian, Martin Ostermayr | 2013-08-27 |
| 8450122 | Test structures and methods | — | 2013-05-28 |
| 8377800 | Alignment marks for polarized light lithography and method for use thereof | Chandrasekhar Sarma, Alois Gutmann | 2013-02-19 |
| 8330937 | Stray light feedback for dose control in semiconductor lithography systems | Wai-Kin Li, Todd C. Bailey | 2012-12-11 |
| 8203223 | Overlay target for polarized light lithography | — | 2012-06-19 |
| 8183129 | Alignment marks for polarized light lithography and method for use thereof | Chandrasekhar Sarma, Alois Gutmann | 2012-05-22 |
| 8071261 | Lithography masks and methods of manufacture thereof | Alois Gutmann, Henning Haffner, Chandrasekhar Sarma, Haoren Zhuang, Matthias Lipinski | 2011-12-06 |
| 7947431 | Lithography masks and methods of manufacture thereof | Chandrasekhar Sarma, Alois Gutmann, Henning Haffner, Josef Maynollo | 2011-05-24 |
| 7820458 | Test structures and methods | — | 2010-10-26 |
| 7807320 | Overlay target for polarized light lithography | — | 2010-10-05 |
| 7799486 | Lithography masks and methods of manufacture thereof | Chandrasekhar Sarma, Alois Gutmann, Henning Haffner, Josef Maynollo | 2010-09-21 |
| 7713824 | Small feature integrated circuit fabrication | Chandrasekhar Sarma, Alois Gutmann, Josef Maynollo | 2010-05-11 |
| 7687925 | Alignment marks for polarized light lithography and method for use thereof | Chandrasekhar Sarma, Alois Gutmann | 2010-03-30 |
| 7674703 | Gridded contacts in semiconductor devices | Roberto Schiwon, Klaus Herold, Jenny Lian, Martin Ostermayr | 2010-03-09 |
| 7666800 | Feature patterning methods | Alois Gutmann, Klaus Herold, Chandrasekhar Sarma | 2010-02-23 |
| 7583362 | Stray light feedback for dose control in semiconductor lithography systems | Wai-Kin Li, Todd C. Bailey | 2009-09-01 |
| 7556898 | Overlay target for polarized light lithography | — | 2009-07-07 |
| 7514356 | Ribs for line collapse prevention in damascene structures | O Seo Park, Wai-Kin Li, Todd C. Bailey | 2009-04-07 |