| 10210292 |
Process-metrology reproducibility bands for lithographic photomasks |
Ioana Graur, Scott D. Halle, Marshal A. Miller |
2019-02-19 |
$3,019,000 |
| 9928316 |
Process-metrology reproducibility bands for lithographic photomasks |
Ioana Graur, Scott D. Halle, Marshal A. Miller |
2018-03-27 |
$2,459,000 |
| 9223202 |
Method of automatic fluid dispensing for imprint lithography processes |
Byung-Jin Choi, Sidlgata V. Sreenivasan, Carlton G. Willson, Mattherw E. Colburn, John Ekerdt |
2015-12-29 |
|
| 8514374 |
Alignment method for semiconductor processing |
William Chu, William A. Muth |
2013-08-20 |
$3,918,000 |
| 8491984 |
Structure resulting from chemical shrink process over BARC (bottom anti-reflective coating) |
Colin J. Brodsky, Allen H. Gabor |
2013-07-23 |
$2,085,000 |
| 8495527 |
Pattern recognition with edge correction for design based metrology |
Daniel S. Fischer, Dongbing Shao |
2013-07-23 |
$2,085,000 |
| 8429570 |
Pattern recognition with edge correction for design based metrology |
Daniel S. Fischer, Dongbing Shao |
2013-04-23 |
$7,839,000 |
| 8415212 |
Method of enhancing photoresist adhesion to rare earth oxides |
James K. Schaeffer, Eric D. Luckowski, Amy L. Child, Daniel Jaeger, Renee T. Mo +1 more |
2013-04-09 |
$3,391,000 |
| 8359562 |
System and method for semiconductor device fabrication using modeling |
Chandrasekhar Sarma |
2013-01-22 |
$9,574,000 |
| 8330937 |
Stray light feedback for dose control in semiconductor lithography systems |
Sajan Marokkey, Wai-Kin Li |
2012-12-11 |
$5,394,000 |
| 8110496 |
Method for performing chemical shrink process over BARC (bottom anti-reflective coating) |
Colin J. Brodsky, Allen H. Gabor |
2012-02-07 |
$8,176,000 |
| 8033814 |
Device for holding a template for use in imprint lithography |
Byung-Jin Choi, Matthew E. Colburn, Sidlgata V. Sreenivasan, Carlton G. Willson, John Ekerdt |
2011-10-11 |
|
| 7998871 |
Mask forming and implanting methods using implant stopping layer |
Katherina Babich, Richard A. Conti, Ryan P. Deschner |
2011-08-16 |
$4,692,000 |
| 7926006 |
Variable fill and cheese for mitigation of BEOL topography |
Ryan P. Deschner, Wai-Kin Li, Roger A. Quon |
2011-04-12 |
$5,593,000 |
| 7708542 |
Device for holding a template for use in imprint lithography |
Byung-Jin Choi, Matthew E. Colburn, Sidlgata V. Sreenivasan, Carlton G. Willson, John Ekerdt |
2010-05-04 |
|
| 7651947 |
Mask forming and implanting methods using implant stopping layer and mask so formed |
Katherina Babich, Richard A. Conti, Ryan P. Deschner |
2010-01-26 |
$13,842,000 |
| 7583362 |
Stray light feedback for dose control in semiconductor lithography systems |
Sajan Marokkey, Wai-Kin Li |
2009-09-01 |
|
| 7514356 |
Ribs for line collapse prevention in damascene structures |
Sajan Marokkey, O Seo Park, Wai-Kin Li |
2009-04-07 |
|
| 7303383 |
Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks |
Sidlgata V. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn |
2007-12-04 |
|
| 7288478 |
Method for performing chemical shrink process over BARC (bottom anti-reflective coating) |
Colin J. Brodsky, Allen H. Gabor |
2007-10-30 |
$4,304,000 |
| 7229273 |
Imprint lithography template having a feature size under 250 nm |
Byung-Jin Choi, Matthew E. Colburn, Sidlgata V. Sreenivasan, Carlton G. Willson, John Ekerdt |
2007-06-12 |
|
| 7186483 |
Method of determining alignment of a template and a substrate having a liquid disposed therebetween |
Sidlgata V. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn |
2007-03-06 |
|
| 7083898 |
Method for performing chemical shrink process over BARC (bottom anti-reflective coating) |
Colin J. Brodsky, Allen H. Gabor |
2006-08-01 |
$2,070,000 |
| 7060324 |
Method of creating a dispersion of a liquid on a substrate |
Byung-Jin Choi, Matthew E. Colburn, Sidlgata V. Sreenivasan, C. Grant Willson, John Ekerdt |
2006-06-13 |
|
| 6986975 |
Method of aligning a template with a substrate employing moire patterns |
Sidlgata V. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn |
2006-01-17 |
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