Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8514374 | Alignment method for semiconductor processing | Todd C. Bailey, William Chu | 2013-08-20 |
| 7962302 | Predicting wafer failure using learned probability | Robert J. Baseman, Susan G. Conti, Michal Rosen-Zvi, Frederick A. Scholl | 2011-06-14 |
| 7957826 | Methods for normalizing error in photolithographic processes | Christopher P. Ausschnitt, Richard H. Broberg, David Crow, Keith Roberts | 2011-06-07 |
| 7879515 | Method to control semiconductor device overlay using post etch image metrology | Christopher P. Ausschnitt | 2011-02-01 |
| 6975398 | Method for determining semiconductor overlay on groundrule devices | Christopher P. Ausschnitt | 2005-12-13 |
| 6638671 | Combined layer-to-layer and within-layer overlay control system | Christopher P. Ausschnitt | 2003-10-28 |
| 5757507 | Method of measuring bias and edge overlay error for sub-0.5 micron ground rules | Christopher P. Ausschnitt | 1998-05-26 |
| 5712707 | Edge overlay measurement target for sub-0.5 micron ground rules | Christopher P. Ausschnitt | 1998-01-27 |