| 12197133 |
Tool control using multistage LSTM for predicting on-wafer measurements |
Dung Phan, Ramachandran Muralidhar, Fateh A. Tipu, Nam H. Nguyen |
2025-01-14 |
|
| 12073152 |
Vehicle asset modeling using language processing methods |
Elham Khabiri, Anuradha Bhamidipaty, Chandrasekhara K. Reddy, Srideepika Jayaraman |
2024-08-27 |
$42,279,000 |
| 11954615 |
Model management for non-stationary systems |
Dung Phan, Fateh A. Tipu, Nam H. Nguyen, Ramachandran Muralidhar |
2024-04-09 |
$10,928,000 |
| 11599690 |
Wafer asset modeling using language processing methods |
Elham Khabiri, Anuradha Bhamidipaty, Chandrasekhara K. Reddy, Srideepika Jayaraman |
2023-03-07 |
$13,230,000 |
| 11410891 |
Anomaly detection and remedial recommendation |
Dzung Tien Phan, Nam H. Nguyen, Fateh A. Tipu, Ramachandran Muralidhar |
2022-08-09 |
$6,406,000 |
| 11022965 |
Controlling multi-stage manufacturing process based on internet of things (IOT) sensors and cognitive rule induction |
Jayant R. Kalagnanam, Young-Min Lee, Jie Ma, Jian Wang, Guan Qun Zhang |
2021-06-01 |
$4,052,000 |
| 10585425 |
Controlling multi-stage manufacturing process based on internet of things (IOT) sensors and cognitive rule induction |
Jayant R. Kalagnanam, Young-Min Lee, Jie Ma, Jian Wang, Guan Qun Zhang |
2020-03-10 |
$1,254,000 |
| 10365640 |
Controlling multi-stage manufacturing process based on internet of things (IoT) sensors and cognitive rule induction |
Jayant R. Kalagnanam, Young-Min Lee, Jie Ma, Jian Wang, Guan Qun Zhang |
2019-07-30 |
$4,347,000 |
| 9915942 |
System and method for identifying significant and consumable-insensitive trace features |
Amit Dhurandhar, Fateh A. Tipu |
2018-03-13 |
$2,527,000 |
| 9395408 |
System for wafer quality predictive modeling based on multi-source information with heterogeneous relatedness |
Yada Zhu, Jingrui He |
2016-07-19 |
$2,452,000 |
| 9299623 |
Run-to-run control utilizing virtual metrology in semiconductor manufacturing |
Jingrui He, Emmanuel Yashchin, Yada Zhu |
2016-03-29 |
$2,226,000 |
| 9240360 |
Run-to-run control utilizing virtual metrology in semiconductor manufacturing |
Jingrui He, Emmanuel Yashchin, Yada Zhu |
2016-01-19 |
$15,136,000 |
| 9176183 |
Method and system for wafer quality predictive modeling based on multi-source information with heterogeneous relatedness |
Yada Zhu, Jingrui He |
2015-11-03 |
$718,000 |
| 8793106 |
Continuous prediction of expected chip performance throughout the production lifecycle |
Amit Dhurandhar, Sholom M. Weiss, Brian F. White |
2014-07-29 |
$5,690,000 |
| 8732627 |
Method and apparatus for hierarchical wafer quality predictive modeling |
Jingrui He, Yada Zhu |
2014-05-20 |
$10,035,000 |
| 8718809 |
Comprehensive analysis of queue times in microelectronic manufacturing |
Tomasz J. Nowicki |
2014-05-06 |
$5,370,000 |
| 8639375 |
Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones |
Tomasz J. Nowicki, Fateh A. Tipu |
2014-01-28 |
$3,630,000 |
| 8594821 |
Detecting combined tool incompatibilities and defects in semiconductor manufacturing |
Fateh A. Tipu, Sholom M. Weiss |
2013-11-26 |
$4,812,000 |
| 8594826 |
Method and system for evaluating a machine tool operating characteristics |
Ehud Aharoni, Ramona Kei, Oded Margalit, Kevin J. Mackey, Michal Rosen-Zvi +6 more |
2013-11-26 |
$4,812,000 |
| 8533635 |
Rule-based root cause and alias analysis for semiconductor manufacturing |
Fateh A. Tipu, Sholom M. Weiss |
2013-09-10 |
$8,933,000 |
| 8328950 |
Foreign material contamination detection |
Tomasz J. Nowicki |
2012-12-11 |
$5,394,000 |
| 8315729 |
Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones |
Tomasz J. Nowicki, Fateh A. Tipu |
2012-11-20 |
$9,610,000 |
| 8285414 |
Method and system for evaluating a machine tool operating characteristics |
Ehud Aharoni, Ramona Kei, Oded Margalit, Kevin J. Mackey, Michal Rosen-Zvi +6 more |
2012-10-09 |
$6,551,000 |
| 7962302 |
Predicting wafer failure using learned probability |
Susan G. Conti, William A. Muth, Michal Rosen-Zvi, Frederick A. Scholl |
2011-06-14 |
$3,503,000 |
| 7650251 |
System and method for rule-based data mining and problem detection for semiconductor fabrication |
Fateh A. Tipu, Sholom M. Weiss |
2010-01-19 |
$15,189,000 |
