Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Rule-based root cause and alias analysis for semiconductor manufacturing

Rule-based root cause and alias analysis for semiconductor manufacturing

US Patent 8533635 · Granted Sep 10, 2013

Estimated economic value: $8,933,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tool control using multistage LSTM for predicting on-wafer measurements2025
Tool control using multistage LSTM for predicting on-wafer measurements2025
Vehicle asset modeling using language processing methods2024
Model management for non-stationary systems2024
Model management for non-stationary systems2024
Wafer asset modeling using language processing methods2023
Anomaly detection and remedial recommendation2022
Anomaly detection and remedial recommendation2022
Generating an expected prescriptions model using graphical models2021
Controlling multi-stage manufacturing process based on internet of things (IOT) 2021
Controlling multi-stage manufacturing process based on internet of things (IOT) 2020
Controlling multi-stage manufacturing process based on internet of things (IoT) 2019