| 12197133 |
Tool control using multistage LSTM for predicting on-wafer measurements |
Dung Phan, Robert J. Baseman, Ramachandran Muralidhar, Nam H. Nguyen |
2025-01-14 |
| 11954615 |
Model management for non-stationary systems |
Dung Phan, Robert J. Baseman, Nam H. Nguyen, Ramachandran Muralidhar |
2024-04-09 |
| 11410891 |
Anomaly detection and remedial recommendation |
Dzung Tien Phan, Robert J. Baseman, Nam H. Nguyen, Ramachandran Muralidhar |
2022-08-09 |
| 9915942 |
System and method for identifying significant and consumable-insensitive trace features |
Robert J. Baseman, Amit Dhurandhar |
2018-03-13 |
| 8639375 |
Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones |
Robert J. Baseman, Tomasz J. Nowicki |
2014-01-28 |
| 8594821 |
Detecting combined tool incompatibilities and defects in semiconductor manufacturing |
Robert J. Baseman, Sholom M. Weiss |
2013-11-26 |
| 8533635 |
Rule-based root cause and alias analysis for semiconductor manufacturing |
Robert J. Baseman, Sholom M. Weiss |
2013-09-10 |
| 8315729 |
Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones |
Robert J. Baseman, Tomasz J. Nowicki |
2012-11-20 |
| 7650251 |
System and method for rule-based data mining and problem detection for semiconductor fabrication |
Robert J. Baseman, Sholom M. Weiss |
2010-01-19 |
| 7561158 |
Method and apparatus for presenting feature importance in predictive modeling |
Naoki Abe, Edwin Peter Dawson Pednault |
2009-07-14 |
| 7539585 |
System and method for rule-based data mining and problem detection for semiconductor fabrication |
Robert J. Baseman, Sholom M. Weiss |
2009-05-26 |
| 5970464 |
Data mining based underwriting profitability analysis |
Chidanand Apte, Edna Grossman, Edwin Peter Dawson Pednault, Barry K. Rosen, Hsueh-ju Wang +1 more |
1999-10-19 |
