Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954275 | Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography | Byung-Jin Choi, Matthew E. Colburn, S. Sreenivasan, C. Grant Willson, John Ekerdt | 2005-10-11 |
| 6921615 | High-resolution overlay alignment methods for imprint lithography | Sidlgata V. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn | 2005-07-26 |
| 6919152 | High resolution overlay alignment systems for imprint lithography | S. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn | 2005-07-19 |
| 6916585 | Method of varying template dimensions to achieve alignment during imprint lithography | Sidlgata V. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn | 2005-07-12 |
| 6902853 | Dual wavelength method of determining a relative position of a substrate and a template | Sidlgata V. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn | 2005-06-07 |
| 6842229 | Imprint lithography template comprising alignment marks | Sidlgata V. Sreenivasan, Byung-Jin Choi, Matthew E. Colburn | 2005-01-11 |
| 6696220 | Template for room temperature, low pressure micro-and nano-imprint lithography | Byung-Jin Choi, Matthew E. Colburn, S. Sreenivasan, C. Grant Willson, John Ekerdt | 2004-02-24 |