Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821082 | Reduced defect deposition processes | Xiaoquan Min, Byung Ik Song, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee | 2023-11-21 |
| 11133212 | High temperature electrostatic chuck | Abdul Aziz Khaja, Jun Ma, Fei Wu, Jian Li | 2021-09-28 |
| 10103018 | Apparatus for treating substrate | Hyung Joon Kim, Seung Pyo Lee | 2018-10-16 |
| 9978567 | Apparatus and method of treating a substrate | Yong-Hyun Ham, Hyun-Joong Kim, Wan Jae Park, Kyu Young Han | 2018-05-22 |
| 9496121 | Antenna units, substrate treating apparatuses including the same, and substrate treating methods using the apparatuses | Hyung Joon Kim | 2016-11-15 |