| 12421607 |
Systems and methods for substrate support temperature control |
Zubin Huang, Rui Cheng |
2025-09-23 |
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| 12402981 |
Prophy angle with splatter guard |
Daniel Wang, Chunyu Wang |
2025-09-02 |
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| 12318259 |
Prophy angle with splatter guard |
Daniel Wang, Chunyu Wang |
2025-06-03 |
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| 12300474 |
Semiconductor substrate support power transmission components |
Paul Brillhart, Katherine Woo, Matthew L. Miller, Shinnosuke Kawaguchi |
2025-05-13 |
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| 12258703 |
Method for preparation of plasma-treated nanofiber-based hydrogen gas sensing material |
Feipeng Wang, Kelin Hu, Zijia Shen, Hongcheng Liu, Jianglin Xiong +5 more |
2025-03-25 |
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| 12131934 |
Semiconductor substrate support leveling apparatus |
Katherine Woo, Paul Brillhart, Shinnosuke Kawaguchi, David W. Groechel, Dorothea Buechel-Rimmel +4 more |
2024-10-29 |
$69,228,000 |
| 12099897 |
Image processing for scanning devices based on laser aimer position |
Minyi Wang, Jian Xing, Liu HONGYAN, Lidong Gu, Yu HU |
2024-09-24 |
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| 12094748 |
Bipolar esc with balanced RF impedance |
Edward P. Hammond, IV, Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno, Wenhao Zhang |
2024-09-17 |
$46,375,000 |
| 12080584 |
Real time bias detection and correction for electrostatic chuck |
Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno |
2024-09-03 |
$44,731,000 |
| 12057339 |
Bipolar electrostatic chuck to limit DC discharge |
Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Zheng John Ye, Paul Brillhart |
2024-08-06 |
$90,312,000 |
| 12040210 |
Multi-pressure bipolar electrostatic chucking |
Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji, Mayur Govind Kulkarni +6 more |
2024-07-16 |
$116,305,000 |
| 12000048 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more |
2024-06-04 |
$68,807,000 |
| 11981998 |
Systems and methods for substrate support temperature control |
Zubin Huang, Rui Cheng |
2024-05-14 |
$61,768,000 |
| 11927491 |
Self-calibration detection device and temperature demodulation method oriented to fiber Raman temperature sensing system |
Mingjiang Zhang, Jianzhong Zhang, Lijun Qiao, Baoqiang Yan, Yang Xu +4 more |
2024-03-12 |
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| 11901209 |
High temperature bipolar electrostatic chuck |
Zheng John Ye, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez |
2024-02-13 |
$47,589,000 |
| 11852410 |
Back-blowing unblocking device for dustproof screen of dryer, dustproof equipment, and dryer |
Hongbing Wang, Guozhi LIU, Xin Wang |
2023-12-26 |
|
| 11851758 |
Fabrication of a high temperature showerhead |
Sumit Agarwal, Katherine Woo, Shawyon Jafari, Chidambara A. Ramalingam |
2023-12-26 |
$30,871,000 |
| 11830706 |
Heated pedestal design for improved heat transfer and temperature uniformity |
Venkata Sharat Chandra Parimi, Zubin Huang, Satish Radhakrishnan, Rui Cheng, Diwakar Kedlaya +7 more |
2023-11-28 |
$39,424,000 |
| 11808639 |
High-precision temperature demodulation method oriented toward distributed fiber Raman sensor |
Mingjiang Zhang, Jianzhong Zhang, Lijun Qiao, Tao Wang, Yuncai Wang +3 more |
2023-11-07 |
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| 11731321 |
Method for preparing microgroove array surface with nearly cylindrical surface based on air molding method |
Weifeng Jin, Xin Ju, Lamei Wang |
2023-08-22 |
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| 11699602 |
Substrate support assemblies and components |
Edward P. Hammond, IV, Viren Kalsekar, Vidyadharan Srinivasa Murthy Bangalore, Juan Carlos Rocha-Alvarez |
2023-07-11 |
$39,838,000 |
| 11655144 |
Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method |
Fanlin ZENG, Lamei Wang, Rao Fu, Gang Liu, Jie Luo |
2023-05-23 |
|
| 11594440 |
Real time bias detection and correction for electrostatic chuck |
Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno |
2023-02-28 |
$49,197,000 |
| 11587817 |
High temperature bipolar electrostatic chuck |
Zheng John Ye, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez |
2023-02-21 |
$24,540,000 |
| 11584994 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more |
2023-02-21 |
$24,540,000 |
