Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421607 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng | 2025-09-23 |
| 12402981 | Prophy angle with splatter guard | Daniel Wang, Chunyu Wang | 2025-09-02 |
| 12318259 | Prophy angle with splatter guard | Daniel Wang, Chunyu Wang | 2025-06-03 |
| 12300474 | Semiconductor substrate support power transmission components | Paul Brillhart, Katherine Woo, Matthew L. Miller, Shinnosuke Kawaguchi | 2025-05-13 |
| 12258703 | Method for preparation of plasma-treated nanofiber-based hydrogen gas sensing material | Feipeng Wang, Kelin Hu, Zijia Shen, Hongcheng Liu, Jianglin Xiong +5 more | 2025-03-25 |
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Shinnosuke Kawaguchi, David W. Groechel, Dorothea Buechel-Rimmel +4 more | 2024-10-29 |
| 12099897 | Image processing for scanning devices based on laser aimer position | Minyi Wang, Jian Xing, Liu HONGYAN, Lidong Gu, Yu HU | 2024-09-24 |
| 12094748 | Bipolar esc with balanced RF impedance | Edward P. Hammond, IV, Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno, Wenhao Zhang | 2024-09-17 |
| 12080584 | Real time bias detection and correction for electrostatic chuck | Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno | 2024-09-03 |
| 12057339 | Bipolar electrostatic chuck to limit DC discharge | Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Zheng John Ye, Paul Brillhart | 2024-08-06 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji, Mayur Govind Kulkarni +6 more | 2024-07-16 |
| 12000048 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2024-06-04 |
| 11981998 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng | 2024-05-14 |
| 11927491 | Self-calibration detection device and temperature demodulation method oriented to fiber Raman temperature sensing system | Mingjiang Zhang, Jianzhong Zhang, Lijun Qiao, Baoqiang Yan, Yang Xu +4 more | 2024-03-12 |
| 11901209 | High temperature bipolar electrostatic chuck | Zheng John Ye, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez | 2024-02-13 |
| 11852410 | Back-blowing unblocking device for dustproof screen of dryer, dustproof equipment, and dryer | Hongbing Wang, Guozhi LIU, Xin Wang | 2023-12-26 |
| 11851758 | Fabrication of a high temperature showerhead | Sumit Agarwal, Katherine Woo, Shawyon Jafari, Chidambara A. Ramalingam | 2023-12-26 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Satish Radhakrishnan, Rui Cheng, Diwakar Kedlaya +7 more | 2023-11-28 |
| 11808639 | High-precision temperature demodulation method oriented toward distributed fiber Raman sensor | Mingjiang Zhang, Jianzhong Zhang, Lijun Qiao, Tao Wang, Yuncai Wang +3 more | 2023-11-07 |
| 11731321 | Method for preparing microgroove array surface with nearly cylindrical surface based on air molding method | Weifeng Jin, Xin Ju, Lamei Wang | 2023-08-22 |
| 11699602 | Substrate support assemblies and components | Edward P. Hammond, IV, Viren Kalsekar, Vidyadharan Srinivasa Murthy Bangalore, Juan Carlos Rocha-Alvarez | 2023-07-11 |
| 11655144 | Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method | Fanlin ZENG, Lamei Wang, Rao Fu, Gang Liu, Jie Luo | 2023-05-23 |
| 11594440 | Real time bias detection and correction for electrostatic chuck | Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno | 2023-02-28 |
| 11587817 | High temperature bipolar electrostatic chuck | Zheng John Ye, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez | 2023-02-21 |
| 11584994 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2023-02-21 |