Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300474 | Semiconductor substrate support power transmission components | Paul Brillhart, Jian Li, Katherine Woo, Matthew L. Miller | 2025-05-13 |
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Jian Li, David W. Groechel, Dorothea Buechel-Rimmel +4 more | 2024-10-29 |
| 11776822 | Wet cleaning of electrostatic chuck | Tuochuan Huang, Gang Peng, David W. Groechel, Vijay D. Parkhe, David Benjaminson | 2023-10-03 |