Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002659 | Apparatus for generating etchants for remote plasma processes | Tae Seung Cho, Kenneth D. Schatz, Ryan Pakulski, Martin Yue Choy, Pratheep Gunaseelan +1 more | 2024-06-04 |
| 11776822 | Wet cleaning of electrostatic chuck | Tuochuan Huang, Gang Peng, David W. Groechel, Vijay D. Parkhe, Shinnosuke Kawaguchi | 2023-10-03 |
| 11217462 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2022-01-04 |
| 11158527 | Thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky | 2021-10-26 |
| 11062887 | High temperature RF heater pedestals | Soonam Park, Xikun Wang, Dmitry Lubomirsky | 2021-07-13 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | Michael H. Grace, Soonam Park, Dmitry Lubomirsky, Jaeyong Cho, Nikolai Kalnin +1 more | 2021-06-29 |
| 10607867 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2020-03-31 |
| 10468276 | Thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky | 2019-11-05 |
| 10233547 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang +1 more | 2019-03-19 |
| 10147620 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2018-12-04 |
| 9896770 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang +1 more | 2018-02-20 |
| 9741593 | Thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky | 2017-08-22 |
| 9691645 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2017-06-27 |
| 9540736 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang +1 more | 2017-01-10 |