Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11217462 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Shubham Chourey | 2022-01-04 |
| 10607867 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Shubham Chourey | 2020-03-31 |
| 10147620 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Shubham Chourey | 2018-12-04 |
| 9691645 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Shubham Chourey | 2017-06-27 |