Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488812 | Method and apparatus for reducing particle defects in plasma etch chambers | Andrew Nguyen, Changhun Lee, Xiaoming He, Meihua Shen | 2022-11-01 |
| 11462411 | Gate contact over active regions | Gaurav Thareja, Keyvan Kashefizadeh, Anchuan Wang, Sanjay Natarajan, Sean M. Seutter +1 more | 2022-10-04 |
| 11062887 | High temperature RF heater pedestals | Soonam Park, David Benjaminson, Dmitry Lubomirsky | 2021-07-13 |
| 11024537 | Methods and apparatus for hybrid feature metallization | Roey Shaviv, Ismail Emesh | 2021-06-01 |
| 11004687 | Gate contact over active processes | Gaurav Thareja, Keyvan Kashefizadeh, Anchuan Wang, Sanjay Natarajan, Sean M. Seutter +1 more | 2021-05-11 |
| 10950500 | Methods and apparatus for filling a feature disposed in a substrate | Roey Shaviv, Ismail Emesh, Jianxin Lei, Wenting Hou | 2021-03-16 |
| 10770346 | Selective cobalt removal for bottom up gapfill | Jianxin Lei, Nitin K. Ingle, Roey Shaviv | 2020-09-08 |
| 10727080 | Tantalum-containing material removal | Naomi Yoshida, Soumendra N. Barman, Nitin K. Ingle | 2020-07-28 |
| 10699953 | Method for creating a fully self-aligned via | Amrita B. Mullick, Nitin K. Ingle, Regina Freed, Uday Mitra, Ho-yung David Hwang | 2020-06-30 |
| 10658161 | Method and apparatus for reducing particle defects in plasma etch chambers | Andrew Nguyen, Changhun Lee, Xiaoming He, Meihua Shen | 2020-05-19 |
| 10465294 | Oxide and metal removal | Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis, Benjamin Schmiege | 2019-11-05 |
| 10256112 | Selective tungsten removal | Nitin K. Ingle | 2019-04-09 |
| 10233547 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Jie Liu +1 more | 2019-03-19 |
| 10163696 | Selective cobalt removal for bottom up gapfill | Jianxin Lei, Nitin K. Ingle, Roey Shaviv | 2018-12-25 |
| 10049891 | Selective in situ cobalt residue removal | Nitin K. Ingle | 2018-08-14 |
| 9947549 | Cobalt-containing material removal | Zhenjiang Cui, Soonam Park, Nitin K. Ingle | 2018-04-17 |
| 9896770 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Jie Liu +1 more | 2018-02-20 |
| 9711366 | Selective etch for metal-containing materials | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Soonam Park, Jeffrey W. Anthis | 2017-07-18 |
| 9659791 | Metal removal with reduced surface roughness | David Cui, Anchuan Wang, Nitin K. Ingle | 2017-05-23 |
| 9607856 | Selective titanium nitride removal | Anchuan Wang, Nitin K. Ingle, Dmitry Lubomirsky | 2017-03-28 |
| 9553102 | Tungsten separation | Jie Liu, Anchuan Wang, Nitin K. Ingle | 2017-01-24 |
| 9540736 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Jie Liu +1 more | 2017-01-10 |
| 9520303 | Aluminum selective etch | Anchuan Wang, Nitin K. Ingle | 2016-12-13 |
| 9478434 | Chlorine-based hardmask removal | Mandar B. Pandit, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle +1 more | 2016-10-25 |
| 9472417 | Plasma-free metal etch | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Soonam Park, Jeffrey W. Anthis | 2016-10-18 |