Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387927 | Deposition of boron films | Yung-Chen Lin, Chi-I Lang | 2025-08-12 |
| 12327764 | Two-dimension self-aligned scheme with subtractive metal etch | Yung-Chen Lin, Chi-I Lang | 2025-06-10 |
| 12272564 | Tin oxide and tin carbide materials for semiconductor patterning applications | Yung-Chen Lin, Chi-I Lang | 2025-04-08 |
| 12196491 | Adaptive baking method | Tzung-Chen Wu, Heng-Jen Lee, Wen-Zhan Zhou | 2025-01-14 |
| 12025917 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Wen-Zhan Zhou, Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu +1 more | 2024-07-02 |
| 12020908 | Atomic layer etching of Ru metal | Yung-Chen Lin, Chi-I Lang | 2024-06-25 |
| 11994800 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Daniel Lee Diehl, Jothilingam Ramalingam | 2024-05-28 |
| 11869807 | Fully self-aligned subtractive etch | Lili Feng, Yuqiong Dai, Madhur Sachan, Regina Freed | 2024-01-09 |
| 11638374 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2023-04-25 |
| 11550222 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Daniel Lee Diehl, Jothilingam Ramalingam | 2023-01-10 |
| 11508617 | Method of forming interconnect for semiconductor device | Hao Jiang, Chi-Pin Lu, He Ren, Chi-I Lang, Mehul Naik | 2022-11-22 |
| 11508618 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Qingjun Zhou, Ying Zhang | 2022-11-22 |
| 11437274 | Fully self-aligned via | Regina Freed, Madhur Sachan, Susmit Singha Roy, Gabriela Alva, Uday Mitra +4 more | 2022-09-06 |
| 11437238 | Patterning scheme to improve EUV resist and hard mask selectivity | Nancy Fung, Chi-I Lang | 2022-09-06 |
| 11335690 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2022-05-17 |
| 11204200 | Adaptive baking method | Tzung-Chen Wu, Wen-Zhan Zhou, Heng-Jen Lee | 2021-12-21 |
| 11164938 | DRAM capacitor module | Uday Mitra, Regina Freed, Sanjay Natarajan, Lequn Liu | 2021-11-02 |
| 11139205 | Self-aligned subtractive interconnect patterning | Lei Zhong | 2021-10-05 |
| 11094589 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Qingjun Zhou, Ying Zhang | 2021-08-17 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2021-02-02 |
| 10840138 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ying Zhang | 2020-11-17 |
| 10699953 | Method for creating a fully self-aligned via | Amrita B. Mullick, Nitin K. Ingle, Xikun Wang, Regina Freed, Uday Mitra | 2020-06-30 |
| 10600688 | Methods of producing self-aligned vias | Ying Zhang, Regina Freed, Nitin K. Ingle, Uday Mitra | 2020-03-24 |
| 10593594 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ying Zhang, Uday Mitra, Regina Freed | 2020-03-17 |
| 10573555 | Methods of producing self-aligned grown via | Ying Zhang, Regina Freed, Nitin K. Ingle, Uday Mitra, Abhijit Basu Mallick | 2020-02-25 |