| 12410523 |
Integrated low k recovery and ALD metal deposition process for advanced technology node |
Shinjae Kwon, Xinyi Lu, Fredrick J. Kim, Bo Xie, Li-Qun Xia +1 more |
2025-09-09 |
|
| 12387927 |
Deposition of boron films |
Yung-Chen Lin, Ho-yung David Hwang |
2025-08-12 |
|
| 12327764 |
Two-dimension self-aligned scheme with subtractive metal etch |
Yung-Chen Lin, Ho-yung David Hwang |
2025-06-10 |
|
| 12272564 |
Tin oxide and tin carbide materials for semiconductor patterning applications |
Yung-Chen Lin, Ho-yung David Hwang |
2025-04-08 |
|
| 12020908 |
Atomic layer etching of Ru metal |
Yung-Chen Lin, Ho-yung David Hwang |
2024-06-25 |
$57,214,000 |
| 11508617 |
Method of forming interconnect for semiconductor device |
Hao Jiang, Chi-Pin Lu, He Ren, Ho-yung David Hwang, Mehul Naik |
2022-11-22 |
$48,755,000 |
| 11495461 |
Film stack for lithography applications |
Tejinder Singh, Suketu Arun Parikh, Daniel Lee Diehl, Michael Stolfi, Jothilingam Ramalingam +3 more |
2022-11-08 |
$47,551,000 |
| 11437238 |
Patterning scheme to improve EUV resist and hard mask selectivity |
Nancy Fung, Ho-yung David Hwang |
2022-09-06 |
$39,364,000 |
| 10954129 |
Diamond-like carbon as mandrel |
Takehito Koshizawa, Eswaranand Venkatasubramanian, Pramit Manna, Chi-Pin Lu, Nancy Fung +1 more |
2021-03-23 |
$48,969,000 |
| 10867795 |
Method of etching hardmasks containing high hardness materials |
Nancy Fung, Gene S. Lee, Hailong Zhou, Zohreh Hesabi, Akhil Mehrotra +3 more |
2020-12-15 |
$107,472,000 |
| 9245744 |
Combinatorial plasma enhanced deposition and etch techniques |
Sunil Shanker, Tony P. Chiang |
2016-01-26 |
$68,000 |
| 9245848 |
Methods for coating a substrate with an amphiphilic compound |
Anh Duong, Tony P. Chiang, Zachary Fresco, Nitin Kumar, Jinhong Tong +1 more |
2016-01-26 |
$68,000 |
| 9245793 |
Plasma treatment of low-K surface to improve barrier deposition |
Ratsamee Limdulpaiboon, Frank Greer, J. Watanabe, Wenxian Zhu |
2016-01-26 |
$68,000 |
| 9224644 |
Method to control depth profiles of dopants using a remote plasma source |
Sandip Niyogi, Amol Joshi, Salil Mujumdar |
2015-12-29 |
$129,000 |
| 9178145 |
Methods for forming resistive switching memory elements |
Nitin Kumar, Tony P. Chiang, Zhi-Wen Sun, Jinhong Tong |
2015-11-03 |
$43,000 |
| 9176181 |
High throughput current-voltage combinatorial characterization tool and method for combinatorial solar test substrates |
Yun Wang, Tony P. Chiang |
2015-11-03 |
$43,000 |
| 9175382 |
High metal ionization sputter gun |
Hong Sheng Yang, Tony P. Chiang, Kent Riley Child, ShouQian Shao |
2015-11-03 |
$43,000 |
| 9147841 |
Resistive-switching memory element |
Tony P. Chiang, Prashant B. Phatak |
2015-09-29 |
$1,078,000 |
| 9105563 |
Method and system of improved uniformity testing |
Charlene Chen, Tony P. Chiang, Yun Wang |
2015-08-11 |
$190,000 |
| 9103871 |
High throughput quantum efficiency combinatorial characterization tool and method for combinatorial solar test substrates |
Yun Wang, Tony P. Chiang |
2015-08-11 |
$190,000 |
| 9023438 |
Methods and apparatus for combinatorial PECVD or PEALD |
ShouQian Shao, Jingang Su |
2015-05-05 |
$318,000 |
| 8987143 |
Hydrogen plasma cleaning of germanium oxide surfaces |
Ratsamee Limdulpaiboon, Sandip Niyogi, J. Watanabe |
2015-03-24 |
$1,253,000 |
| 8980709 |
Resistive-switching memory element |
Tony P. Chiang, Prashant B. Phatak |
2015-03-17 |
$176,000 |
| 8920618 |
Combinatorial processing using high deposition rate sputtering |
Hong Sheng Yang, Zhendong Hong |
2014-12-30 |
$389,000 |
| 8906207 |
Control of film composition in co-sputter deposition by using collimators |
Hong Sheng Yang, Tony P. Chiang |
2014-12-09 |
$262,000 |
