Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942332 | Methods of etching metal-containing layers | Akhil Mehrotra, Gene S. Lee, Abhijit Patil, Shan Jiang | 2024-03-26 |
| 11417537 | Methods of etching metal-containing layers | Akhil Mehrotra, Gene S. Lee, Abhijit Patil, Shan Jiang | 2022-08-16 |
| 11127599 | Methods for etching a hardmask layer | Shan Jiang, Gene S. Lee, Akhil Mehrotra | 2021-09-21 |
| 10957558 | Methods of etching metal-containing layers | Akhil Mehrotra, Gene Lee, Abhijit Patil, Shan Jiang | 2021-03-23 |
| 10867795 | Method of etching hardmasks containing high hardness materials | Nancy Fung, Gene S. Lee, Hailong Zhou, Akhil Mehrotra, Shan Jiang +3 more | 2020-12-15 |
| 10830756 | Method to create a free-standing membrane for biological applications | Ankit Vora, Kenichi Ohno, Philip Allan Kraus, Joseph R. Johnson | 2020-11-10 |
| 10636675 | Methods of etching metal-containing layers | Akhil Mehrotra, Gene Lee, Abhijit Patil, Shan Jiang | 2020-04-28 |