Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942332 | Methods of etching metal-containing layers | Gene S. Lee, Abhijit Patil, Shan Jiang, Zohreh Hesabi | 2024-03-26 |
| 11817312 | Delayed pulsing for plasma processing of wafers | Vinay Shankar Vidyarthi, Daksh Agarwal, SAMANEH SADIGHI, Jason A. Kenney, Rajinder Dhindsa | 2023-11-14 |
| 11417537 | Methods of etching metal-containing layers | Gene S. Lee, Abhijit Patil, Shan Jiang, Zohreh Hesabi | 2022-08-16 |
| 11127599 | Methods for etching a hardmask layer | Shan Jiang, Gene S. Lee, Zohreh Hesabi | 2021-09-21 |
| 10957558 | Methods of etching metal-containing layers | Gene Lee, Abhijit Patil, Shan Jiang, Zohreh Hesabi | 2021-03-23 |
| 10867795 | Method of etching hardmasks containing high hardness materials | Nancy Fung, Gene S. Lee, Hailong Zhou, Zohreh Hesabi, Shan Jiang +3 more | 2020-12-15 |
| 10636675 | Methods of etching metal-containing layers | Gene Lee, Abhijit Patil, Shan Jiang, Zohreh Hesabi | 2020-04-28 |
| 10497578 | Methods for high temperature etching a material layer using protection coating | Hailong Zhou, Gene S. Lee, Abhijit Patil, Shan Jiang, Jonathan Kim | 2019-12-03 |