Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817312 | Delayed pulsing for plasma processing of wafers | Akhil Mehrotra, Vinay Shankar Vidyarthi, SAMANEH SADIGHI, Jason A. Kenney, Rajinder Dhindsa | 2023-11-14 |
| 10847368 | EUV resist patterning using pulsed plasma | Byungkook Kong, Sangwook Kim, Seunghyun Park, Abhjeet Bagal, Kyoungjin LEE | 2020-11-24 |