Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847368 | EUV resist patterning using pulsed plasma | Sangwook Kim, Seunghyun Park, Abhjeet Bagal, Kyoungjin LEE, Daksh Agarwal | 2020-11-24 |
| 10727075 | Uniform EUV photoresist patterning utilizing pulsed plasma process | Sang-wook Kim, Zhibin Wang, Kyoungjin LEE | 2020-07-28 |
| 10580657 | Device fabrication via pulsed plasma | Chang Wook Doh, Zhibin Wang, Sang-wook Kim, Sang-jun Choi | 2020-03-03 |
| 10347500 | Device fabrication via pulsed plasma | Chang Wook Doh, Zhibin Wang, Sang-wook Kim, Sang-jun Choi | 2019-07-09 |
| 9627216 | Method for forming features in a silicon containing layer | Hoon Sang Lee, Jinsu Kim, Ho Jeong Kim, Xiaosong Ji, Hun Sang Kim +1 more | 2017-04-18 |
| 9418867 | Mask passivation using plasma | Hung Sang Kim, Hoon Sang Lee, Jeong Hyun Yoo, Jun Wan Kim | 2016-08-16 |
| 9390923 | Methods of removing residual polymers formed during a boron-doped amorphous carbon layer etch process | Jeong Hyun Yoo, Hoon Sang Lee | 2016-07-12 |
| 9299580 | High aspect ratio plasma etch for 3D NAND semiconductor applications | Gene Lee, Liming Yang | 2016-03-29 |
| 9287124 | Method of etching a boron doped carbon hardmask | Jun Wan Kim, Wonmo Ahn, Jeong Hyun Yoo, Hun Sang Kim | 2016-03-15 |
| 9064812 | Aspect ratio dependent etch (ARDE) lag reduction process by selective oxidation with inert gas sputtering | Jinsu Kim, Xiaosong Ji, Jinhan Choi, Ho Jeong Kim, Hoon Sang Lee | 2015-06-23 |