Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418867 | Mask passivation using plasma | Byungkook Kong, Hung Sang Kim, Hoon Sang Lee, Jun Wan Kim | 2016-08-16 |
| 9390923 | Methods of removing residual polymers formed during a boron-doped amorphous carbon layer etch process | Hoon Sang Lee, Byungkook Kong | 2016-07-12 |
| 9287124 | Method of etching a boron doped carbon hardmask | Byungkook Kong, Jun Wan Kim, Wonmo Ahn, Hun Sang Kim | 2016-03-15 |