Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532801 | Organic electroluminescent device comprising a redox-doped electron transport layer and an auxiliary electron transport layer | Domagoj Pavicic, Jerome Ganier, Vygintas Jankus, Hyungsun Kim, Byungku KIM +4 more | 2022-12-20 |
| 11094511 | Processing chamber with substrate edge enhancement processing | Changhun Lee, Michael D. Willwerth, Valentin N. Todorow, Hean Cheal Lee | 2021-08-17 |
| 10770329 | Gas flow for condensation reduction with a substrate processing chuck | Michael D. Willwerth | 2020-09-08 |
| 10186444 | Gas flow for condensation reduction with a substrate processing chuck | Michael D. Willwerth | 2019-01-22 |
| 9627216 | Method for forming features in a silicon containing layer | Byungkook Kong, Hoon Sang Lee, Jinsu Kim, Ho Jeong Kim, Xiaosong Ji +1 more | 2017-04-18 |
| 9425058 | Simplified litho-etch-litho-etch process | Jinhan Choi, Shinichi Koseki | 2016-08-23 |
| 9287124 | Method of etching a boron doped carbon hardmask | Byungkook Kong, Jun Wan Kim, Wonmo Ahn, Jeong Hyun Yoo | 2016-03-15 |
| 8293656 | Selective self-aligned double patterning of regions in an integrated circuit device | Hyungje Woo, Shinichi Koseki, Eda Tuncel, Chung Liu | 2012-10-23 |
| 8133819 | Plasma etching carbonaceous layers with sulfur-based etchants | Judy Wang, Shawming Ma, Chang-Lin Hsieh, Bryan Liao, Jie Zhou | 2012-03-13 |