Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237149 | Reducing aspect ratio dependent etch with direct current bias pulsing | Deyang Li, Sunil Srinivasan, Yi-Chuan Chou, Shahid Rauf, Kuan-Ting Liu +5 more | 2025-02-25 |
| 12125699 | Selective carbon deposition on top and bottom surfaces of semiconductor substrates | Abhijeet S. Bagal, Qian Fu, Kuan-Ting Liu | 2024-10-22 |
| 11562909 | Directional selective junction clean with field polymer protections | Yu Lei, Xuesong Lu, Tae Hong Ha, Xianmin Tang, Andrew Nguyen +4 more | 2023-01-24 |
| 9533332 | Methods for in-situ chamber clean utilized in an etching processing chamber | Noel Sun, Meihua Shen, Nicolas Gani, Radhika Mani | 2017-01-03 |
| 8293656 | Selective self-aligned double patterning of regions in an integrated circuit device | Hun Sang Kim, Hyungje Woo, Shinichi Koseki, Eda Tuncel | 2012-10-23 |