Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237149 | Reducing aspect ratio dependent etch with direct current bias pulsing | Deyang Li, Sunil Srinivasan, Yi-Chuan Chou, Shahid Rauf, Kuan-Ting Liu +5 more | 2025-02-25 |
| 11894220 | Method and apparatus for controlling a processing reactor | Tina Dhekial-Phukan, Venkata Ravishankar Kasibhotla, Ajit Balakrishna, Sanggyum Kim | 2024-02-06 |
| 11869754 | Dynamic pressure control for processing chambers implementing real-time learning | Tina Dhekial-Phukan | 2024-01-09 |
| 11556117 | Real-time anomaly detection and classification during semiconductor processing | Shahab Arabshahi | 2023-01-17 |
| 11154619 | Liposomal compositions with light illumination-induced drug release | Igor Meerovich, Alekha Dash, David Smith | 2021-10-26 |