Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198951 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Sultan Malik, Sean S. Kang +1 more | 2025-01-14 |
| 12147212 | Diagnostic methods for substrate manufacturing chambers using physics-based models | Tao Zhang, Xiaoqun Zou, Bala Shyamala Balaji | 2024-11-19 |
| 11894220 | Method and apparatus for controlling a processing reactor | Michael Nichols, Tina Dhekial-Phukan, Ajit Balakrishna, Sanggyum Kim | 2024-02-06 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Sultan Malik, Sean S. Kang +1 more | 2020-01-07 |
| 10224224 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Sultan Malik, Sean S. Kang +1 more | 2019-03-05 |