| 12203171 |
Batch curing chamber with gas distribution and individual pumping |
Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang |
2025-01-21 |
|
| 12198951 |
High pressure wafer processing systems and related methods |
Qiwei Liang, Srinivas D. Nemani, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more |
2025-01-14 |
|
| 12146219 |
Flow control features of CVD chambers |
Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more |
2024-11-19 |
$80,955,000 |
| 11948828 |
Pin-less substrate transfer apparatus and method for a processing chamber |
Sultan Malik, Srinivas D. Nemani, Qiwei Liang |
2024-04-02 |
$42,223,000 |
| 11756803 |
Gas delivery system for high pressure processing chamber |
Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh |
2023-09-12 |
$47,983,000 |
| 11749555 |
Semiconductor processing system |
Sultan Malik, Srinivas D. Nemani, Qiwei Liang |
2023-09-05 |
$42,922,000 |
| 11725274 |
Integrated cluster tool for selective area deposition |
Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang |
2023-08-15 |
$42,730,000 |
| 11527421 |
Gas delivery system for high pressure processing chamber |
Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh |
2022-12-13 |
|
| 11408075 |
Batch curing chamber with gas distribution and individual pumping |
Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang |
2022-08-09 |
$67,965,000 |
| 11361978 |
Gas delivery module |
Qiwei Liang, Sultan Malik, Srinivas D. Nemani |
2022-06-14 |
$21,647,000 |
| D941787 |
Substrate transfer blade |
Sultan Malik, Srinivas D. Nemani, Qiwei Liang |
2022-01-25 |
|
| 11110383 |
Gas abatement apparatus |
Qiwei Liang, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more |
2021-09-07 |
$49,370,000 |
| 11066747 |
Chemical delivery chamber for self-assembled monolayer processes |
Qiwei Liang, Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet |
2021-07-20 |
$88,311,000 |
| 10947621 |
Low vapor pressure chemical delivery |
Qiwei Liang, Srinivas D. Nemani, Tobin Kaufman-Osborn |
2021-03-16 |
$56,717,000 |
| 10748783 |
Gas delivery module |
Qiwei Liang, Sultan Malik, Srinivas D. Nemani |
2020-08-18 |
$40,862,000 |
| 10720341 |
Gas delivery system for high pressure processing chamber |
Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh |
2020-07-21 |
|
| 10704141 |
In-situ CVD and ALD coating of chamber to control metal contamination |
Sultan Malik, Srinivas D. Nemani, Qiwei Liang, Maximillian Clemons |
2020-07-07 |
$29,619,000 |
| 10675581 |
Gas abatement apparatus |
Qiwei Liang, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more |
2020-06-09 |
$53,212,000 |
| 10550472 |
Flow control features of CVD chambers |
Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more |
2020-02-04 |
$27,329,000 |
| 10529603 |
High pressure wafer processing systems and related methods |
Qiwei Liang, Srinivas D. Nemani, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more |
2020-01-07 |
|
| 10358715 |
Integrated cluster tool for selective area deposition |
Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang |
2019-07-23 |
$50,020,000 |
| 10224224 |
High pressure wafer processing systems and related methods |
Qiwei Liang, Srinivas D. Nemani, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more |
2019-03-05 |
|
| 10179941 |
Gas delivery system for high pressure processing chamber |
Qiwei Liang, Sultan Malik, Keith Tatseun Wong, Srinivas D. Nemani |
2019-01-15 |
$61,415,000 |
| 10113236 |
Batch curing chamber with gas distribution and individual pumping |
Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang |
2018-10-30 |
$15,195,000 |
| 9285168 |
Module for ozone cure and post-cure moisture treatment |
Dmitry Lubomirsky, Jay D. Pinson, II, Kirby H. Floyd, Shankar Venkataraman |
2016-03-15 |
$10,944,000 |
