Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203171 | Batch curing chamber with gas distribution and individual pumping | Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2025-01-21 |
| 12198951 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more | 2025-01-14 |
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2024-11-19 |
| 11948828 | Pin-less substrate transfer apparatus and method for a processing chamber | Sultan Malik, Srinivas D. Nemani, Qiwei Liang | 2024-04-02 |
| 11756803 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh | 2023-09-12 |
| 11749555 | Semiconductor processing system | Sultan Malik, Srinivas D. Nemani, Qiwei Liang | 2023-09-05 |
| 11725274 | Integrated cluster tool for selective area deposition | Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang | 2023-08-15 |
| 11527421 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh | 2022-12-13 |
| 11408075 | Batch curing chamber with gas distribution and individual pumping | Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2022-08-09 |
| 11361978 | Gas delivery module | Qiwei Liang, Sultan Malik, Srinivas D. Nemani | 2022-06-14 |
| D941787 | Substrate transfer blade | Sultan Malik, Srinivas D. Nemani, Qiwei Liang | 2022-01-25 |
| 11110383 | Gas abatement apparatus | Qiwei Liang, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2021-09-07 |
| 11066747 | Chemical delivery chamber for self-assembled monolayer processes | Qiwei Liang, Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet | 2021-07-20 |
| 10947621 | Low vapor pressure chemical delivery | Qiwei Liang, Srinivas D. Nemani, Tobin Kaufman-Osborn | 2021-03-16 |
| 10748783 | Gas delivery module | Qiwei Liang, Sultan Malik, Srinivas D. Nemani | 2020-08-18 |
| 10720341 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh | 2020-07-21 |
| 10704141 | In-situ CVD and ALD coating of chamber to control metal contamination | Sultan Malik, Srinivas D. Nemani, Qiwei Liang, Maximillian Clemons | 2020-07-07 |
| 10675581 | Gas abatement apparatus | Qiwei Liang, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2020-06-09 |
| 10550472 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2020-02-04 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more | 2020-01-07 |
| 10358715 | Integrated cluster tool for selective area deposition | Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Qiwei Liang | 2019-07-23 |
| 10224224 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more | 2019-03-05 |
| 10179941 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Sultan Malik, Keith Tatseun Wong, Srinivas D. Nemani | 2019-01-15 |
| 10113236 | Batch curing chamber with gas distribution and individual pumping | Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2018-10-30 |
| 9285168 | Module for ozone cure and post-cure moisture treatment | Dmitry Lubomirsky, Jay D. Pinson, II, Kirby H. Floyd, Shankar Venkataraman | 2016-03-15 |