Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300497 | Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene | Thai Cheng Chua, Christian Valencia, Chikuang Charles Wang, Bencherki Mebarki, Philip Allan Kraus | 2025-05-13 |
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2024-11-19 |
| 12002654 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Kallol Bera, Philip Allan Kraus | 2024-06-04 |
| 11501955 | Modular high-frequency source with integrated gas distribution | Thai Cheng Chua, Philip Allan Kraus | 2022-11-15 |
| 11488796 | Thermal break for high-frequency antennae | Thai Cheng Chua, Philip Allan Kraus | 2022-11-01 |
| 11393661 | Remote modular high-frequency source | Thai Cheng Chua, Philip Allan Kraus | 2022-07-19 |
| 11081317 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Kallol Bera, Philip Allan Kraus | 2021-08-03 |
| 10943768 | Modular high-frequency source with integrated gas distribution | Thai Cheng Chua, Philip Allan Kraus | 2021-03-09 |
| 10550472 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2020-02-04 |
| 10269593 | Apparatus for coupling a hot wire source to a process chamber | JOE GRIFFITH CRUZ, Randy Vrana, Karl J. Armstrong | 2019-04-23 |
| 9416450 | Showerhead designs of a hot wire chemical vapor deposition (HWCVD) chamber | Joe Griffith Cruz | 2016-08-16 |
| 9206512 | Gas distribution system | Majeed A. Foad, Dieter Haas, Karl J. Armstrong, Xiaoxiong Yuan | 2015-12-08 |
| 8999106 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Wei Liu, Johanes F. Swenberg, Son T. Nguyen, Roger Curtis, Philip A. Bottini +1 more | 2015-04-07 |
| 8894767 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2014-11-25 |
| 8137463 | Dual zone gas injection nozzle | Wei Liu, Johanes S. Swenberg, Son T. Nguyen, Roger Curtis, Philip A. Bottini | 2012-03-20 |
| 8062472 | Method of correcting baseline skew by a novel motorized source coil assembly | Wei Liu, Johanes F. Swenberg, Son T. Nguyen, Roger Curtis, Philip A. Bottini | 2011-11-22 |
| 6110322 | Prevention of ground fault interrupts in a semiconductor processing system | Hong Teoh, James Jin-Long Chen, Cuong Cao Nguyen | 2000-08-29 |