Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11885021 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George +2 more | 2024-01-30 |
| 11124878 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George +2 more | 2021-09-21 |
| 10290504 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2019-05-14 |
| 9831091 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2017-11-28 |
| 8999106 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Wei Liu, Johanes F. Swenberg, Hanh Nguyen, Son T. Nguyen, Roger Curtis +1 more | 2015-04-07 |
| 8137463 | Dual zone gas injection nozzle | Wei Liu, Johanes S. Swenberg, Hanh Nguyen, Son T. Nguyen, Roger Curtis | 2012-03-20 |
| 8062472 | Method of correcting baseline skew by a novel motorized source coil assembly | Wei Liu, Johanes F. Swenberg, Hanh Nguyen, Son T. Nguyen, Roger Curtis | 2011-11-22 |