Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354843 | Process chamber process kit with protective coating | Jian-Lin Wu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Lara Hawrylchak | 2025-07-08 |
| 12272521 | Plasma sources and plasma processing apparatus thereof | Vladimir Nagorny, Rene George | 2025-04-08 |
| D1068701 | Box for transporting boards | Ming-Chien Chiu, Yung-Chin Pan, Cheng-En Chung, Chih-Ming Lin, PO-TING LEE +1 more | 2025-04-01 |
| D1068700 | Box for transporting boards | Ming-Chien Chiu, Yung-Chin Pan, Cheng-En Chung, Chih-Ming Lin, PO-TING LEE +1 more | 2025-04-01 |
| D1067892 | Box for transporting boards | Ming-Chien Chiu, Yung-Chin Pan, Chih-Ming Lin | 2025-03-25 |
| 12243762 | Door locking mechanism and semiconductor container using the same | Ming-Chien Chiu, Yung-Chin Pan, Cheng-En Chung, Chih-Ming Lin, PO-TING LEE +1 more | 2025-03-04 |
| 12237190 | Supporting shelf module and wafer container using same | Ming-Chien Chiu, EN-NIEN SHEN, Yung-Chin Pan, Cheng-En Chung, PO-TING LEE +1 more | 2025-02-25 |
| 12183608 | Substrate container with enhanced flow field therein | Ming-Chien Chiu, EN-NIEN SHEN, Yung-Chin Pan, Chih-Ming Lin, Cheng-En Chung +2 more | 2024-12-31 |
| 11987431 | Top-opening substrate carrier | Ming-Chien Chiu, Yung-Chin Pan, Cheng-En Chung, Chih-Ming Lin, PO-TING LEE +1 more | 2024-05-21 |
| 11854770 | Plasma processing with independent temperature control | Vladimir Nagorny, Rene George | 2023-12-26 |
| 11658006 | Plasma sources and plasma processing apparatus thereof | Vladimir Nagorny, Rene George | 2023-05-23 |
| 11615986 | Methods and apparatus for metal silicide deposition | Xuebin Li, Gaurav Thareja, Shashank Sharma, Patricia M. Liu, Schubert S. Chu | 2023-03-28 |
| D976001 | Box for transporting boards | Ming-Chien Chiu, Yung-Chin Pan, Tzu-Ning Huang | 2023-01-24 |
| 11152221 | Methods and apparatus for metal silicide deposition | Xuebin Li, Gaurav Thareja, Shashank Sharma, Patricia M. Liu, Schubert S. Chu | 2021-10-19 |
| 10580643 | Fluorination during ALD high-k, fluorination post high-k and use of a post fluorination anneal to engineer fluorine bonding and incorporation | Johanes S. Swenberg, Linlin Wang | 2020-03-03 |
| 10510545 | Hydrogenation and nitridization processes for modifying effective oxide thickness of a film | Houda Graoui, Johanes S. Swenberg, Steven C. H. Hung | 2019-12-17 |
| 10504779 | Hydrogenation and nitridization processes for reducing oxygen content in a film | Johanes S. Swenberg, Houda Graoui, Shashank Sharma, Shankar Muthukrishnan, Rene George | 2019-12-10 |
| 10431466 | Hydrogenation and nitridization processes for modifying effective oxide thickness of a film | Johanes S. Swenberg, Houda Graoui, Steven C. H. Hung | 2019-10-01 |
| 10347492 | Modifying work function of a metal film with a plasma process | Steven C. H. Hung, Johanes S. Swenberg, Houda Graoui | 2019-07-09 |
| 10290504 | Plasma treating a process chamber | Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui, Philip A. Bottini +3 more | 2019-05-14 |
| 10236207 | Hydrogenation and nitridization processes for reducing oxygen content in a film | Johanes S. Swenberg, Houda Graoui, Shashank Sharma, Shankar Muthukrishnan, Rene George | 2019-03-19 |
| 10103027 | Hydrogenation and nitridization processes for modifying effective oxide thickness of a film | Johanes S. Swenberg, Houda Graoui, Shashank Sharma | 2018-10-16 |
| 9966271 | Method for modifying epitaxial growth shape | Hua Chung, Xuebin Li, Yuxiang LU | 2018-05-08 |
| 9831091 | Plasma treating a process chamber | Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui, Philip A. Bottini +3 more | 2017-11-28 |
| 9530898 | Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof | Udayan Ganguly, Yoshitaka Yokota, Jing Tang, Sunderraj Thirupapuliyur, Christopher S. Olsen +6 more | 2016-12-27 |