Issued Patents All Time
Showing 25 most recent of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354843 | Process chamber process kit with protective coating | Jian-Lin Wu, Wei Liu, Theresa Kramer Guarini, Linlin Wang, Lara Hawrylchak | 2025-07-08 |
| 12266560 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang +2 more | 2025-04-01 |
| D1034491 | Edge ring | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang +2 more | 2024-07-09 |
| 11927482 | Methods for calibrating an optical emission spectrometer | Kin Pong Lo, Lara Hawrylchak, Theresa Kramer Guarini, Wei Liu, Bernard L. Hwang | 2024-03-12 |
| 11923441 | Gate all around I/O engineering | Steven C. H. Hung, Benjamin Colombeau, Andy Lo, Byeong-Chan Lee, Johanes F. Swenberg +1 more | 2024-03-05 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2023-02-14 |
| 11456178 | Gate interface engineering with doped layer | Steven C. H. Hung, Benjamin Colombeau, Abhishek Dube, Sheng-Chin Kung, Patricia M. Liu +1 more | 2022-09-27 |
| 11450759 | Gate all around I/O engineering | Steven C. H. Hung, Benjamin Colombeau, Andy Lo, Byeong-Chan Lee, Johanes F. Swenberg +1 more | 2022-09-20 |
| 11380575 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang +2 more | 2022-07-05 |
| 11271097 | Cap oxidation for FinFET formation | Steven C. H. Hung, Benjamin Colombeau, Abhishek Dube, Sheng-Chin Kung, Patricia M. Liu +1 more | 2022-03-08 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Johanes S. Swenberg, Vladimir Nagorny +4 more | 2021-04-06 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2021-03-16 |
| 10872763 | Treatments to enhance material structures | David Chu, Steven C. H. Hung, Charles Chu, Tatsuya Sato, Shih Chung Chen +2 more | 2020-12-22 |
| 10290504 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Houda Graoui, Philip A. Bottini +3 more | 2019-05-14 |
| 10068771 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2018-09-04 |
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Ken Kaung Lai, Bernard L. Hwang +2 more | 2018-08-14 |
| 9892927 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2018-02-13 |
| 9831091 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Houda Graoui, Philip A. Bottini +3 more | 2017-11-28 |
| 9779946 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2017-10-03 |
| 9576804 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2017-02-21 |
| 9396951 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2016-07-19 |
| 9368355 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2016-06-14 |
| 9337046 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2016-05-10 |
| 9337044 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2016-05-10 |
| 9177806 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2015-11-03 |