Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272521 | Plasma sources and plasma processing apparatus thereof | Wei Liu, Rene George | 2025-04-08 |
| 12266560 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2025-04-01 |
| 12211677 | Uniformity control for plasma processing | Rene George | 2025-01-28 |
| 12068134 | Digital control of plasma processing | — | 2024-08-20 |
| D1034491 | Edge ring | Kin Pong Lo, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2024-07-09 |
| 12027426 | Image-based digital control of plasma processing | — | 2024-07-02 |
| 11854770 | Plasma processing with independent temperature control | Wei Liu, Rene George | 2023-12-26 |
| 11658006 | Plasma sources and plasma processing apparatus thereof | Wei Liu, Rene George | 2023-05-23 |
| 11380575 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2022-07-05 |
| 11201036 | Plasma strip tool with uniformity control | Shawming Ma, Dixit V. Desai, Ryan Pakulski | 2021-12-14 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more | 2021-04-06 |
| 10790119 | Plasma processing apparatus with post plasma gas injection | Shawming Ma, Dixit V. Desai, Ryan Pakulski | 2020-09-29 |
| 10297457 | Controlling azimuthal uniformity of etch process in plasma processing chamber | — | 2019-05-21 |
| 10049858 | System and method for protection of vacuum seals in plasma processing systems | Steven E. Parks, Martin L. Zucker | 2018-08-14 |
| 9653264 | Inductively coupled plasma source for plasma processing | Dongsoo Lee, Andreas Kadavanich | 2017-05-16 |
| 9214319 | High efficiency plasma source | Charles Crapuchettes | 2015-12-15 |
| 7972444 | Workpiece support with fluid zones for temperature control | Martin L. Zucker, Daniel J. Devine, Jonathan D. Mohn | 2011-07-05 |
| 5072992 | Shield unit | Valery F. Gorbunov, ALexandr F. Eller, ALexandr Y. Tkachenko, Vladimir V. Axenov | 1991-12-17 |