Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515127 | End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum | Peter J. Lembesis, Ryan Pakulski | 2022-11-29 |
| 11508560 | Focus ring adjustment assembly of a system for processing workpieces under vacuum | Peter J. Lembesis, Ryan Pakulski, Shawming Ma | 2022-11-22 |
| 11348767 | Plasma processing apparatus having a focus ring adjustment assembly | Peter J. Lembesis, Ryan Pakulski, Shawming Ma | 2022-05-31 |
| 11251026 | Material deposition prevention on a workpiece in a process chamber | Jeffrey Cue | 2022-02-15 |
| 11195704 | Pedestal assembly for plasma processing apparatus | Tinghao Wang | 2021-12-07 |
| 10049858 | System and method for protection of vacuum seals in plasma processing systems | Vladimir Nagorny, Steven E. Parks | 2018-08-14 |
| 9184072 | Advanced multi-workpiece processing chamber | Daniel J. Devine, Charles Crapuchettes, Dixit V. Desai, Rene George, Vincent Lee +4 more | 2015-11-10 |
| 8668422 | Low cost high throughput processing platform | Leszek Niewmierzycki, David A. Barker, Daniel J. Devine, Michael Kuhlman, Ryan Pakulski +1 more | 2014-03-11 |
| 8405005 | Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate | Daniel J. Devine, Young Jai Lee | 2013-03-26 |
| 7972444 | Workpiece support with fluid zones for temperature control | Daniel J. Devine, Vladimir Nagorny, Jonathan D. Mohn | 2011-07-05 |
| 7658586 | Advanced low cost high throughput processing platform | Leszek Niewmierzycki, David A. Barker, Michael Kuhlman, Ryan Pakulski, Hongqing Shan | 2010-02-09 |
| 7563068 | Low cost high throughput processing platform | Leszek Niewmierzycki, David A. Barker, Daniel J. Devine, Michael Kuhlman, Ryan Pakulski +1 more | 2009-07-21 |
| 6835278 | Systems and methods for remote plasma clean | Steven C. Selbrede, Neil Mackie | 2004-12-28 |
| 6120610 | Plasma etch system | Vladimir E. Leibovich | 2000-09-19 |
| 5985089 | Plasma etch system | Vladimir E. Leibovich | 1999-11-16 |
| 5958139 | Plasma etch system | Vladimir E. Leibovich | 1999-09-28 |