Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049858 | System and method for protection of vacuum seals in plasma processing systems | Vladimir Nagorny, Martin L. Zucker | 2018-08-14 |
| 8284489 | Spectrally adjustable filter | Christopher S. Koeppen | 2012-10-09 |
| 7864423 | Spectrally adjustable filter | Christopher S. Koeppen | 2011-01-04 |
| 7817272 | High-resolution spectrally adjustable filter | Christopher S. Koeppen | 2010-10-19 |
| 6666588 | Collimator array having precisely aligned optical beams and method of assembling same | Neal H. Thorsten, Christopher S. Koeppen, Wayne F. Thomas, Kenneth Mahon | 2003-12-23 |
| 6301434 | Apparatus and method for CVD and thermal processing of semiconductor substrates | James McDiarmid, Kristian E. Johnsgard, Mark Johnsgard | 2001-10-09 |