Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633876 | Selective reflectivity process chamber with customized wavelength response and method | Paul Janis Timans, Daniel J. Devine, Yao Zhi Hu, Peter C. Bordiga | 2017-04-25 |
| 8405005 | Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate | Martin L. Zucker, Daniel J. Devine | 2013-03-26 |
| 7737385 | Selective reflectivity process chamber with customized wavelength response and method | Paul Janis Timans, Daniel J. Devine, Yao Zhi Hu, Peter C. Bordiga | 2010-06-15 |
| 7115837 | Selective reflectivity process chamber with customized wavelength response and method | Paul Janis Timans, Daniel J. Devine, Yao Zhi Hu, Peter C. Bordiga | 2006-10-03 |
| 7045746 | Shadow-free shutter arrangement and method | Daniel J. Devine, Paul Janis Timans, Frank Lema | 2006-05-16 |