Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633876 | Selective reflectivity process chamber with customized wavelength response and method | Paul Janis Timans, Daniel J. Devine, Young Jai Lee, Peter C. Bordiga | 2017-04-25 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Paul Janis Timans, Wilfried Lerch, Juergen Niess, Manfred Falter +6 more | 2011-07-12 |
| 7737385 | Selective reflectivity process chamber with customized wavelength response and method | Paul Janis Timans, Daniel J. Devine, Young Jai Lee, Peter C. Bordiga | 2010-06-15 |
| 7151060 | Device and method for thermally treating semiconductor wafers | Georg Roters, Steffen Frigge, Sing-Pin Tay, Regina Hayn, Jens-Uwe Sachse +2 more | 2006-12-19 |
| 7115837 | Selective reflectivity process chamber with customized wavelength response and method | Paul Janis Timans, Daniel J. Devine, Young Jai Lee, Peter C. Bordiga | 2006-10-03 |
| 6706643 | UV-enhanced oxy-nitridation of semiconductor substrates | Sing-Pin Tay | 2004-03-16 |
| 6707011 | Rapid thermal processing system for integrated circuits | Sing-Pin Tay | 2004-03-16 |
| 6600138 | Rapid thermal processing system for integrated circuits | Markus Hauf, Sing-Pin Tay | 2003-07-29 |
| 6451713 | UV pretreatment process for ultra-thin oxynitride formation | Sing-Pin Tay, Sagy Levy, Jeffrey C. Gelpey | 2002-09-17 |
| 6403923 | System for controlling the temperature of a reflective substrate during rapid heating | Sing-Pin Tay, Randhir P. S. Thakur, Arnon Gat | 2002-06-11 |
| 6359263 | System for controlling the temperature of a reflective substrate during rapid heating | Sing-Pin Tay, Randhir P. S. Thakur, Arnon Gat | 2002-03-19 |
| 6204484 | System for measuring the temperature of a semiconductor wafer during thermal processing | Sing-Pin Tay | 2001-03-20 |
| 6200023 | Method for determining the temperature in a thermal processing chamber | Sing-Pin Tay, Randhir P. S. Thakur | 2001-03-13 |
| 6075922 | Process for preventing gas leaks in an atmospheric thermal processing chamber | Sing-Pin Tay, Yuval Wasserman | 2000-06-13 |
| 5624190 | Method and apparatus for measuring the temperature of an object, in particular a semiconductor, by ellipsometry | Jacques Joseph, Eugene A. Irene | 1997-04-29 |