| 8138451 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Bob Bogart |
2012-03-20 |
| 7608802 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Bob Bogart |
2009-10-27 |
| 7226488 |
Fast heating and cooling apparatus for semiconductor wafers |
— |
2007-06-05 |
| 7038174 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Bob Bogart |
2006-05-02 |
| 6919271 |
Method for rapidly heating and cooling semiconductor wafers |
— |
2005-07-19 |
| 6771895 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Bob Bogart |
2004-08-03 |
| 6727474 |
Rapid thermal processing chamber for processing multiple wafers |
— |
2004-04-27 |
| 6717158 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Bob Bogart, Conor Patrick O'Carroll, Paul Janis Timans, Shuen Chun Choy, Zion Koren +1 more |
2004-04-06 |
| 6610967 |
Rapid thermal processing chamber for processing multiple wafers |
— |
2003-08-26 |
| 6403923 |
System for controlling the temperature of a reflective substrate during rapid heating |
Sing-Pin Tay, Yao Zhi Hu, Randhir P. S. Thakur |
2002-06-11 |
| 6359263 |
System for controlling the temperature of a reflective substrate during rapid heating |
Sing-Pin Tay, Yao Zhi Hu, Randhir P. S. Thakur |
2002-03-19 |
| 6310328 |
Rapid thermal processing chamber for processing multiple wafers |
— |
2001-10-30 |
| 5970214 |
Heating device for semiconductor wafers |
— |
1999-10-19 |
| 5960158 |
Apparatus and method for filtering light in a thermal processing chamber |
Robert J. Champetier, Ram Z. Fabian |
1999-09-28 |
| 5874711 |
Apparatus and method for determining the temperature of a radiating surface |
Robert J. Champetier, Avner Man, Ram Z. Fabian |
1999-02-23 |
| 5165796 |
Bichannel radiation detection apparatus |
Michael P. French |
1992-11-24 |
| 5114242 |
Bichannel radiation detection method |
David Mordo |
1992-05-19 |
| 4356384 |
Method and means for heat treating semiconductor material using high intensity CW lamps |
— |
1982-10-26 |
| 4331485 |
Method for heat treating semiconductor material using high intensity CW lamps |
— |
1982-05-25 |
| 4233671 |
Read only memory and integrated circuit and method of programming by laser means |
Levy Gerzberg, Roger D. Melen, James F. Gibbons |
1980-11-11 |
| 4214918 |
Method of forming polycrystalline semiconductor interconnections, resistors and contacts by applying radiation beam |
Levy Gerzberg, James F. Gibbons |
1980-07-29 |