Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8138451 | Heating device for heating semiconductor wafers in thermal processing chambers | Bob Bogart | 2012-03-20 |
| 7608802 | Heating device for heating semiconductor wafers in thermal processing chambers | Bob Bogart | 2009-10-27 |
| 7226488 | Fast heating and cooling apparatus for semiconductor wafers | — | 2007-06-05 |
| 7038174 | Heating device for heating semiconductor wafers in thermal processing chambers | Bob Bogart | 2006-05-02 |
| 6919271 | Method for rapidly heating and cooling semiconductor wafers | — | 2005-07-19 |
| 6771895 | Heating device for heating semiconductor wafers in thermal processing chambers | Bob Bogart | 2004-08-03 |
| 6727474 | Rapid thermal processing chamber for processing multiple wafers | — | 2004-04-27 |
| 6717158 | Heating device for heating semiconductor wafers in thermal processing chambers | Bob Bogart, Conor Patrick O'Carroll, Paul Janis Timans, Shuen Chun Choy, Zion Koren +1 more | 2004-04-06 |
| 6610967 | Rapid thermal processing chamber for processing multiple wafers | — | 2003-08-26 |
| 6403923 | System for controlling the temperature of a reflective substrate during rapid heating | Sing-Pin Tay, Yao Zhi Hu, Randhir P. S. Thakur | 2002-06-11 |
| 6359263 | System for controlling the temperature of a reflective substrate during rapid heating | Sing-Pin Tay, Yao Zhi Hu, Randhir P. S. Thakur | 2002-03-19 |
| 6310328 | Rapid thermal processing chamber for processing multiple wafers | — | 2001-10-30 |
| 5970214 | Heating device for semiconductor wafers | — | 1999-10-19 |
| 5960158 | Apparatus and method for filtering light in a thermal processing chamber | Robert J. Champetier, Ram Z. Fabian | 1999-09-28 |
| 5874711 | Apparatus and method for determining the temperature of a radiating surface | Robert J. Champetier, Avner Man, Ram Z. Fabian | 1999-02-23 |
| 5165796 | Bichannel radiation detection apparatus | Michael P. French | 1992-11-24 |
| 5114242 | Bichannel radiation detection method | David Mordo | 1992-05-19 |
| 4356384 | Method and means for heat treating semiconductor material using high intensity CW lamps | — | 1982-10-26 |
| 4331485 | Method for heat treating semiconductor material using high intensity CW lamps | — | 1982-05-25 |
| 4233671 | Read only memory and integrated circuit and method of programming by laser means | Levy Gerzberg, Roger D. Melen, James F. Gibbons | 1980-11-11 |
| 4214918 | Method of forming polycrystalline semiconductor interconnections, resistors and contacts by applying radiation beam | Levy Gerzberg, James F. Gibbons | 1980-07-29 |