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Method and system for thermally processing a plurality of wafer-shaped objects |
Zsolt Nenyei, Paul Janis Timans, Wilfried Lerch, Juergen Niess, Manfred Falter +6 more |
2011-07-12 |
| 7949237 |
Heating configuration for use in thermal processing chambers |
Zion Koren, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more |
2011-05-24 |
| 7269343 |
Heating configuration for use in thermal processing chambers |
Zion Koren, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more |
2007-09-11 |
| 6970644 |
Heating configuration for use in thermal processing chambers |
Zion Koren, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more |
2005-11-29 |
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Heating device for heating semiconductor wafers in thermal processing chambers |
Arnon Gat, Bob Bogart, Paul Janis Timans, Shuen Chun Choy, Zion Koren +1 more |
2004-04-06 |
| 6559424 |
Windows used in thermal processing chambers |
Rudy Santo Tomas Cardema, James Tsuneo Taoka, Zion Koren |
2003-05-06 |
| 5870488 |
Method and apparatus for prealigning wafers in a wafer sorting system |
John M. Rush, J. Randolph Andrews, Richard Collins, David Ou |
1999-02-09 |