| 6698992 |
Elastically expandable positioning device |
Kung Chris Wu, Torben Ulander, Chawshiang Wu |
2004-03-02 |
| 6655423 |
Unified pod quick-opening apparatus |
Chawshiang Wu, Torben Ulander, Kung Chris Wu |
2003-12-02 |
| 6592317 |
Pod loader interface end effectors |
Torben Ulander |
2003-07-15 |
| 6494666 |
Simplified and enhanced SCARA arm |
Kung Chris Wu, Torben Ulander |
2002-12-17 |
| 6193459 |
Integrated wafer pod-load/unload and mass-transfer system |
— |
2001-02-27 |
| 6086323 |
Method for supplying wafers to an IC manufacturing process |
Torben Ulander, Michael T. Verdon |
2000-07-11 |
| 5984610 |
Pod loader interface |
Torben Ulander, Michael T. Verdon |
1999-11-16 |
| 5934991 |
Pod loader interface improved clean air system |
— |
1999-08-10 |
| 5885045 |
Integrated wafer pod-load/unload and mass-transfer system |
— |
1999-03-23 |
| 5870488 |
Method and apparatus for prealigning wafers in a wafer sorting system |
J. Randolph Andrews, Richard Collins, Conor Patrick O'Carroll, David Ou |
1999-02-09 |
| 5506744 |
Ionized airflow manifold for static reduction |
Torben Ulander, Michael T. Verdon |
1996-04-09 |
| 5193969 |
Wafer transfer machine |
Torben Ulander, Michael T. Verdon |
1993-03-16 |