Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6698992 | Elastically expandable positioning device | Kung Chris Wu, Chawshiang Wu, John M. Rush | 2004-03-02 |
| 6655423 | Unified pod quick-opening apparatus | John M. Rush, Chawshiang Wu, Kung Chris Wu | 2003-12-02 |
| 6610993 | Load port door assembly with integrated wafer mapper | Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt | 2003-08-26 |
| 6592317 | Pod loader interface end effectors | John M. Rush | 2003-07-15 |
| 6494666 | Simplified and enhanced SCARA arm | Kung Chris Wu, John M. Rush | 2002-12-17 |
| 6396072 | Load port door assembly with integrated wafer mapper | Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt | 2002-05-28 |
| 6239963 | Wafer support with electrostatic discharge bus | — | 2001-05-29 |
| 6086323 | Method for supplying wafers to an IC manufacturing process | John M. Rush, Michael T. Verdon | 2000-07-11 |
| 5984610 | Pod loader interface | John M. Rush, Michael T. Verdon | 1999-11-16 |
| 5506744 | Ionized airflow manifold for static reduction | John M. Rush, Michael T. Verdon | 1996-04-09 |
| 5193969 | Wafer transfer machine | John M. Rush, Michael T. Verdon | 1993-03-16 |