Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610993 | Load port door assembly with integrated wafer mapper | Eric Meyhofer, Kenneth A. Hardy, Torben Ulander | 2003-08-26 |
| 6396072 | Load port door assembly with integrated wafer mapper | Eric Meyhofer, Kenneth A. Hardy, Torben Ulander | 2002-05-28 |
| 6013920 | Wafer-mapping load post interface having an effector position sensing device | Jeffrey Gordon, Kenneth A. Hardy, Steven A. Bumgardner, William E. Wegener, Eric Meyhofer | 2000-01-11 |