| 7695239 |
End effector gripper arms having corner grippers which reorient reticle during transfer |
— |
2010-04-13 |
| 7318697 |
Universal reticle transfer system |
Robert Frank Sifuentes, Kenneth A. Hardy, Edgardo A. Caliboso, Anatoly Malobrodsky, Chien-Rong Huang |
2008-01-15 |
| 6932558 |
Wafer aligner |
— |
2005-08-23 |
| 6698992 |
Elastically expandable positioning device |
Torben Ulander, Chawshiang Wu, John M. Rush |
2004-03-02 |
| 6655423 |
Unified pod quick-opening apparatus |
John M. Rush, Chawshiang Wu, Torben Ulander |
2003-12-02 |
| 6616034 |
Radio frequency identification device |
Chen Wu, Chien-Rong Huang, Jui-Hung Hsu |
2003-09-09 |
| 6494666 |
Simplified and enhanced SCARA arm |
John M. Rush, Torben Ulander |
2002-12-17 |
| 5758025 |
Dynamically adaptive fuzzy interval controller |
— |
1998-05-26 |
| 5533418 |
Spherical robotic shoulder joint |
Rex Melgoza |
1996-07-09 |